Plasma processing Information

From Wikipedia

Plasma processing is a plasma-based material processing technology that aims at modifying the chemical and physical properties of a surface. [1]

Plasma processing techniques include:

Related topics are plasma chemistry, chemical vapor deposition, and physical vapor deposition processes like sputter deposition, plasma iondoping, vacuum plasmaspraying, and reactive ion etching.

See also


  1. ^ National Research Council (1991). Plasma Processing of Materials: Scientific Opportunities and Technological Challenges. Washington, DC: National Academies Press. ISBN  978-0-309-04597-1.